The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2019
Filed:
Apr. 05, 2017
Asml Netherlands B.v., Veldhoven, NL;
Carolus Johannes Catharina Schoormans, Hooge Mierde, NL;
Johannes Jacobus Matheus Baselmans, Oirschot, NL;
Engelbertus Antonius Fransiscus Van Der Pasch, Oirschot, NL;
Johannes Aldegonda Theodorus Marie Van Den Homberg, Nederweert, NL;
Maksym Yuriiovych Sladkov, Veldhoven, NL;
Andreas Johannes Antonius Brouns, Eindhoven, NL;
Alexander Viktorovych Padiy, Geldrop, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic method for measuring a position of a target grating with a mask sensor apparatus which comprises a plurality of detector modules each comprising a diffraction grating located at a mask side of a projection system of a lithographic apparatus and an associated detector, the method comprising a first step of measuring first intensities of a combination of diffraction orders diffracted from the target grating while the mask sensor apparatus is moved relatively to the target grating along a first direction; a second step of displacing the mask sensor apparatus relative to the target grating in a second direction, wherein a size of the relative displacement is proportional to a spatial frequency of a potential error; and a third step of measuring second intensities of the combination of diffraction orders diffracted from the target grating while the mask sensor apparatus is moved relatively to the target grating along the first direction.