The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2019
Filed:
Nov. 10, 2015
Applicant:
Toshiba Memory Corporation, Minato-ku, JP;
Inventors:
Assignee:
Toshiba Memory Corporation, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
B08B 1/04 (2006.01); H01L 21/02 (2006.01); B08B 1/00 (2006.01); A46B 13/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B08B 1/04 (2013.01); A46B 13/02 (2013.01); B08B 1/007 (2013.01); H01L 21/02052 (2013.01); H01L 21/67046 (2013.01);
Abstract
According to one embodiment, there is provided a cleaning apparatus including a substrate cleaner and a member cleaner. The substrate cleaner has a substrate cleaning member placed over a first region to be opposite a substrate and a second region different from the first region. The member cleaner is placed adjacent to the second region.