The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 24, 2019

Filed:

Oct. 24, 2017
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Derek C. Tao, Hsinchu, TW;

Jacklyn Chang, Hsinchu, TW;

Kuoyuan (Peter) Hsu, Hsinchu, TW;

Yukit Tang, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/528 (2006.01); H01L 23/535 (2006.01); G11C 5/06 (2006.01); H01L 27/11 (2006.01); H01L 23/50 (2006.01); G11C 11/418 (2006.01); G11C 11/419 (2006.01); H01L 23/522 (2006.01); H01L 27/02 (2006.01); H01L 27/06 (2006.01); G11C 5/02 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11 (2013.01); G11C 11/418 (2013.01); G11C 11/419 (2013.01); H01L 23/50 (2013.01); H01L 23/528 (2013.01); H01L 23/5226 (2013.01); H01L 27/0207 (2013.01); H01L 27/1116 (2013.01); G11C 5/02 (2013.01); G11C 5/06 (2013.01); G11C 2213/71 (2013.01); H01L 27/0688 (2013.01); H01L 2224/73265 (2013.01);
Abstract

A method of fabricating a memory array includes designing first layout sections in a row direction, each first layout section including first and second control lines in a first metal layer, and an upper conductive line in a third metal layer. A lower conductive line in a second metal layer is coupled to the first control line and the first control line is isolated from the second control line. A second layout section is inserted at every N-th first layout section, N being a positive integer equal to or greater than 2. The second layout section includes the first control line, the second control line and a lower conductive line in the second metal layer coupled to the second control line and to an upper conductive line in the third metal layer. The lower conductive lines in the first and second layout sections are isolated from each other.


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