The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2019
Filed:
May. 03, 2017
Fei Company, Hillsboro, OR (US);
Ali Mohammadi-Gheidari, Best, NL;
Alexander Henstra, Utrecht, NL;
Peter Christiaan Tiemeijer, Eindhoven, NL;
Kun Liu, Beaverton, OR (US);
Pleun Dona, Veldhoven, NL;
Gregory A. Schwind, Portland, OR (US);
Gerbert Jeroen van de Water, Breugel, NL;
FEI Company, Hillsboro, OR (US);
Abstract
A charged particle microscope and a method of operating a charged particle microscope are disclosed. The microscope employs a source for producing charged particles, and a source lens below the source to form a charged particle beam which is directed onto a specimen by a condenser system. A detector collects radiation emanating from the specimen in response to irradiation of the specimen by the beam. The source lens is a compound lens, focusing the beam within a vacuum enclosure using both a magnetic lens having permanent magnets outside the enclosure to produce a magnetic field at the beam, and a variable electrostatic lens within the enclosure.