The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2019
Filed:
Aug. 28, 2017
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G05B 19/418 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67294 (2013.01); G05B 19/4189 (2013.01); G05B 19/41865 (2013.01); H01L 21/6773 (2013.01); H01L 21/67173 (2013.01); H01L 21/67248 (2013.01); H01L 21/67265 (2013.01); H01L 21/67276 (2013.01); H01L 21/67727 (2013.01); H01L 21/67742 (2013.01); H01L 21/67745 (2013.01); H01L 21/67769 (2013.01); H01L 21/67772 (2013.01); H01L 21/67775 (2013.01); B65G 2201/0297 (2013.01); G05B 2219/31276 (2013.01); G05B 2219/32173 (2013.01); G05B 2219/32174 (2013.01); G05B 2219/45031 (2013.01); H01L 21/67069 (2013.01); Y02P 90/28 (2015.11); Y10S 134/902 (2013.01); Y10S 414/14 (2013.01);
Abstract
A substrate processing method is provided. The substrate processing method includes placing a substrate storage container storing a substrate on a load port; automatically determining a type of the substrate stored in the placed substrate storage container; and, by referring to a storage unit that stores parameter data set related to a transport condition for each type of substrate, controlling transport of the substrate stored in the substrate storage container based on the parameter data set corresponding to the automatically determined substrate type to process the substrate.