The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2019
Filed:
Oct. 03, 2018
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Gildardo R. Delgado, Livermore, CA (US);
Rudy F. Garcia, Union City, CA (US);
Katerina Ioakeimidi, San Francisco, CA (US);
Frances Hill, Sunnyvale, CA (US);
Michael E. Romero, San Jose, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 19/24 (2006.01); H01J 37/06 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/06 (2013.01); H01J 19/24 (2013.01); H01J 37/28 (2013.01); H01J 2201/30449 (2013.01);
Abstract
A photocathode structure, which can include an alkali halide, has a protective film on an exterior surface of the photocathode structure. The protective film includes ruthenium. This protective film can be, for example, ruthenium or an alloy of ruthenium and platinum. The protective film can have a thickness from 1 nm to 20 nm. The photocathode structure can be used in an electron beam tool like a scanning electron microscope.