The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2019
Filed:
Jul. 27, 2017
Asml Netherlands B.v., Veldhoven, NL;
Michel Riepen, Veldhoven, NL;
Dzmitry Labetski, Utrecht, NL;
Wilbert Jan Mestrom, Roermond, NL;
Wim Ronald Kampinga, Enschede, NL;
Jan Okke Nieuwenkamp, Enschede, NL;
Jacob Brinkert, Schalkhaar, NL;
Henricus Jozef Castelijns, Bladel, NL;
Nicolaas Ten Kate, Almkerk, NL;
Hendrikus Gijsbertus Schimmel, Utrecht, NL;
Hans Jansen, Eindhoven, NL;
Dennis Jozef Maria Paulussen, Eindhoven, NL;
Brian Vernon Virgo, Eindhoven, NL;
Reinier Theodorus Martinus Jilisen, Eindhoven, NL;
Ramin Badie, Eindhoven, NL;
Albert Pieter Rijpma, Veldhoven, NL;
Johannes Christiaan Leonardus Franken, Knegsel, NL;
Peter Van Putten, Eindhoven, NL;
Gerrit Van Der Straaten, Oisterwijk, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A radiation source comprising a fuel source configured to deliver fuel to a location from which the fuel emits EUV radiation. The radiation source further comprises an immobile fuel debris receiving surface provided with a plurality of grooves. The grooves have orientations which are arranged to direct the flow of liquid fuel under the influence of gravity in one or more desired directions.