The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2019
Filed:
Aug. 31, 2016
Uchicago Argonne, Llc, Chicago, IL (US);
Curt A. Preissner, Chicago, IL (US);
David Vine, Chicago, IL (US);
Chris J. Jacobsen, Naperville, IL (US);
Jorg M. Maser, Oak Park, IL (US);
Barry Lai, Woodridge, IL (US);
Christian Roehrig, Plainfield, IL (US);
Oliver A. Schmidt, Lombard, IL (US);
Franz Stefan Vogt, Plainfield, IL (US);
UChicago Argonne, LLC, Chicago, IL (US);
Abstract
A method and apparatus for implementing an ultra-high stability long-vertical travel stage are provided. The ultra-high stability long-vertical travel stage includes a first wedge supporting a second wedge, each wedge formed of a selected stable material having predefined rigidity and low thermal expansion coefficient, and integrated air bearings. A linear guiding mechanism includes a plurality of flexures. The first wedge is driven in a plane providing vertical motion on the second wedge with the integrated air bearings lifted and the flexures allowing for movement.