The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2019

Filed:

Feb. 17, 2016
Applicant:

Polar Semiconductor, Llc, Bloomington, MN (US);

Inventor:

Don Rankila, Farmington, MN (US);

Assignee:

Polar Semiconductor, LLC, Bloomington, MN (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/40 (2006.01); H01L 29/423 (2006.01); H01L 29/08 (2006.01); H01L 29/417 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7813 (2013.01); H01L 29/0878 (2013.01); H01L 29/407 (2013.01); H01L 29/42376 (2013.01); H01L 29/41766 (2013.01);
Abstract

Apparatus and associate methods relate to a high-voltage MOSFET bounded by two trenches, each having dielectric sidewalls and a dielectric bottom isolating a top field plate and a bottom field plate. The top field plate is electrically connected to a biasing circuit net, and the bottom field plate is biased via a capacitive coupling to the top field plate. The upper field plate and lower field plate are configured to deplete the majority carriers in a drain region of the MOSFET bounded by the two trenches so as to equalize two local maxima of an electric field induced by a drain/body bias, the two local maxima located proximate a drain/body metallurgical junction and proximate a trench bottom. The two local maxima of the electric field are equalized by controlling a depth location of an intervening dielectric between the upper field plate and the lower field plate.


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