The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2019
Filed:
Mar. 03, 2017
Applicants:
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Entegris, Inc., Billerica, MA (US);
Inventors:
Dale K. Stone, Lynnfield, MA (US);
Richard Cooke, Framingham, MA (US);
I-Kuan Lin, Lexington, MA (US);
Julian G. Blake, Gloucester, MA (US);
Lyudmila Stone, Lynnfield, MA (US);
Assignees:
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Entegris, Inc., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/50 (2006.01); H01L 21/683 (2006.01); H02N 13/00 (2006.01); C23C 28/04 (2006.01);
U.S. Cl.
CPC ...
C23C 16/50 (2013.01); C23C 28/042 (2013.01); C23C 28/044 (2013.01); H01L 21/6831 (2013.01); H02N 13/00 (2013.01);
Abstract
In one embodiment, a method of fabricating an electrostatic clamp includes forming an insulator body, forming an electrode on the insulator body, and depositing a layer stack on the electrode, the layer stack comprising an aluminum oxide layer that is deposited using atomic layer deposition (ALD).