The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2019
Filed:
May. 11, 2016
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/26 (2006.01); H01L 21/285 (2006.01); H01L 21/768 (2006.01); C01B 32/16 (2017.01); C01B 32/162 (2017.01); H01L 23/532 (2006.01);
U.S. Cl.
CPC ...
C23C 16/26 (2013.01); C01B 32/16 (2017.08); C01B 32/162 (2017.08); H01L 21/28556 (2013.01); H01L 21/76879 (2013.01); C01B 2202/08 (2013.01); H01L 23/53276 (2013.01); H01L 2221/1094 (2013.01); H01L 2924/0002 (2013.01);
Abstract
A carbon nanotube producing method, which is capable of realizing a low resistant depth-wise wiring. An acetylene gas is first supplied as a carbon-containing gas and subsequently, an ethylene gas is supplied as the carbon-containing gas such that carbon nanotubes are produced.