The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2019
Filed:
Apr. 07, 2016
Applicants:
Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);
Rohm and Haas Electronic Materials Korea Ltd., Chungcheongnam-do, KR;
Inventors:
Seon-Hwa Han, Suwon, KR;
Sung Wook Cho, Seoul, KR;
Hae-Kwang Pyun, Gyeonggi-Do, KR;
Jung-June Lee, Sin-dong, KR;
Shintaro Yamada, Shrewsbury, MA (US);
Assignees:
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Rohm and Haas Electronic Materials Korea Ltd., Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08G 61/12 (2006.01); C08G 61/02 (2006.01); G03F 7/40 (2006.01); G03F 7/36 (2006.01); G03F 7/30 (2006.01); G03F 7/09 (2006.01); G03F 7/075 (2006.01); G03F 7/11 (2006.01); C09D 165/00 (2006.01);
U.S. Cl.
CPC ...
C08G 61/12 (2013.01); C08G 61/02 (2013.01); C09D 165/00 (2013.01); G03F 7/0752 (2013.01); G03F 7/09 (2013.01); G03F 7/091 (2013.01); G03F 7/094 (2013.01); G03F 7/11 (2013.01); G03F 7/30 (2013.01); G03F 7/36 (2013.01); G03F 7/40 (2013.01); G03F 7/405 (2013.01); C08G 2261/12 (2013.01); C08G 2261/135 (2013.01); C08G 2261/1422 (2013.01); C08G 2261/314 (2013.01); C08G 2261/3424 (2013.01); C08G 2261/76 (2013.01); C08G 2261/90 (2013.01);
Abstract
Polymeric reaction products of certain aromatic alcohols with certain diaryl-substituted aliphatic alcohols are useful as underlayers in semiconductor manufacturing processes.