The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2019
Filed:
Apr. 05, 2016
Tokyo Electron Limited, Tokyo, JP;
Daisuke Hayashi, Miyagi, JP;
Masato Takayama, Miyagi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A processing system includes a thermo viewerwhich measures a temperature distribution over a top surface of a semiconductor wafer; a temperature measuring devicewhich measures, for each of divided areas of the semiconductor wafer, a temperature of a portion in the divided area; a median value calculating unitwhich calculates, for each divided area, a median value of a temperature distribution of the divided area, based on the temperature distribution measured by the thermo viewer; an offset calculating unitwhich calculates, for each divided area, a difference between the median value and the temperature of the portion as an offset; and a temperature control unitwhich controls, for each divided area, the temperature of the divided area such that the median value becomes equal to a set temperature, based on the offset and the temperature measured by the temperature measuring device
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile