Contacts formed with self-aligned cuts

Abstract

Methods of fabricating structures that include contacts coupled with a source/drain region of a field-effect transistor. Source/drain regions are formed adjacent to a temporary gate structure. In one process, a sacrificial layer is disposed over the source/drain regions and a dielectric pillar is formed in the sacrificial layer between the source/drain regions, followed by deposition of a fill material, replacement of the temporary gate structure with a functional gate structure, and removal of the fill material. In another process, the fill material is formed first and the temporary gate structure is replaced by a functional gate structure; following removal of the fill material, a sacrificial layer is disposed over the source/drain regions and a dielectric pillar is formed in the sacrificial layer between the source/drain regions. A conductive layer having separate portions contacting the separate source/drain regions is formed, with the dielectric pillar separating the portions of the conductive layer.