The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2019
Filed:
Nov. 25, 2014
Fujikin Incorporated, Osaka, JP;
Takashi Hirose, Osaka, JP;
Toshihide Yoshida, Osaka, JP;
Atsushi Matsumoto, Osaka, JP;
Kaoru Hirata, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
Kouji Nishino, Osaka, JP;
Ryousuke Dohi, Osaka, JP;
Katsuyuki Sugita, Osaka, JP;
Fujikin Incorporated, Osaka, JP;
Abstract
A pressure-type flow rate controller includes a body provided with a fluid passage which communicates a fluid inlet and a fluid outlet, a control valve for pressure control fixed to the body to open and close the fluid passage, an orifice arranged in the course of the fluid passage on the downstream side of the control valve, and a pressure sensor fixed to the body to detect the internal pressure of the fluid passage between the control valve and the orifice, wherein the fluid passage comprises a first passage portion communicating the control valve and a pressure detection chamber provided on a pressure detection surface of the pressure sensor, and a second passage portion spaced away from the first passage portion and communicating the pressure detection chamber and the orifice.