The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2019
Filed:
Oct. 21, 2016
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Karen Biagini, Watsonville, CA (US);
Bryant Stanford Mantiply, Mountain View, CA (US);
Ravichander Jayantha Rao, Bangalore, IN;
Gary Taan, San Jose, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05B 19/418 (2006.01); H01L 21/67 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G05B 19/4184 (2013.01); H01L 21/67253 (2013.01); H01L 21/67288 (2013.01); G05B 2219/37525 (2013.01); H01L 22/20 (2013.01); Y02P 90/14 (2015.11); Y02P 90/20 (2015.11);
Abstract
A process control technique uses production data from multiple manufacturing tools and multiple inspection or metrology tools. Total measurement uncertainty (TMU) can be calculated on the production data, which can include measurements of one or more devices manufactured using the manufacturing tools. Manufacturing steps can be ranked or otherwise compared by TMU. All production modes and recipes can be continually monitored using production data.