The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2019
Filed:
Aug. 26, 2013
Asml Netherlands B.v., Veldhoven, NL;
Johannes Antonius Gerardus Akkermans, Eindhoven, NL;
Bas Pieter Lemmen, Venlo, NL;
Sjoerd Martijn Huiberts, Best, NL;
Joeri Lof, Eindhoven, NL;
Petrus Theodorus Rutgers, Hengelo, NL;
Sven Antoin Johan Hol, Eindhoven, NL;
Harmeet Singh, Fremont, CA (US);
Peter Michel Silvester Maria Heijmans, Weert, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A reluctance actuator assembly comprising a reluctance actuator, a flux sensor to measure a magnetic flux in a gap of the reluctance actuator, and a flux amplifier to drive an actuator coil of the reluctance actuator based on a flux set point and the flux measured by the flux sensor. A method comprising providing to the flux amplifier a flux setpoint, the flux setpoint comprising a time constant component and a sinusoidally varying component at an excitation frequency, measuring a force generated by the reluctance actuator in response to the flux setpoint, and calibrating the reluctance actuator assembly from the measured force.