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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10372039 B1

PDFFull Text
Date of Patent:
Aug. 06, 2019

Filed:

Oct. 24, 2013

Resist underlayer film forming composition containing silicon having ester group

Applicant:

Nissan Chemical Industries, Ltd., Tokyo, JP;

Inventors:

Yuta Kanno, Toyama, JP;

Makoto Nakajima, Toyama, JP;

Satoshi Takeda, Toyama, JP;

Hiroyuki Wakayama, Toyama, JP;

Assignee:

NISSAN CHEMICAL INDUSTRIES, LTD., Tokyo, JP;

Attorney:

Oliff PLC

Primary Examiner:

Sin J Lee

Int. Cl.
CPC ...
G03F 7/075 (2006.01); G03F 7/09 (2006.01); G03F 7/36 (2006.01); G03F 7/30 (2006.01); G03F 7/32 (2006.01); G03F 7/40 (2006.01); C09D 183/06 (2006.01); C09D 183/08 (2006.01); C08G 77/28 (2006.01); C08G 77/14 (2006.01); C08G 77/00 (2006.01); C08G 77/26 (2006.01); H01L 21/02 (2006.01); H01L 21/033 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0757 (2013.01); C08G 77/14 (2013.01); C08G 77/26 (2013.01); C08G 77/28 (2013.01); C08G 77/80 (2013.01); C09D 183/06 (2013.01); C09D 183/08 (2013.01); G03F 7/0752 (2013.01); G03F 7/091 (2013.01); G03F 7/094 (2013.01); G03F 7/30 (2013.01); G03F 7/322 (2013.01); G03F 7/325 (2013.01); G03F 7/36 (2013.01); G03F 7/40 (2013.01); H01L 21/02126 (2013.01); H01L 21/02282 (2013.01); H01L 21/0332 (2013.01);
Abstract

A resist underlayer film forming composition for lithography for a resist underlayer film usable as a hardmask. A resist underlayer film forming composition for lithography, including: as a silane, a hydrolyzable silane, a hydrolysis product thereof, or a hydrolysis-condensation product thereof, wherein the hydrolyzable silane includes a hydrolyzable silane of Formula (1) or a hydrolyzable silane containing a combination of a hydrolyzable silane of Formula (1) with a hydrolyzable silane of Formula (2), and a content of the hydrolyzable silane of Formula (1) or the hydrolyzable silane containing a combination of a hydrolyzable silane of Formula (1) with a hydrolyzable silane of Formula (2) in all silanes is less than 50% by mole,RRSi(R)  Formula (1)RRSi(R)  Formula (2).

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