The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 30, 2019

Filed:

Jul. 30, 2018
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Benjamin David Briggs, Waterford, NY (US);

Lawrence A. Clevenger, LaGrangeville, NY (US);

Bartlet H. Deprospo, Goshen, NY (US);

Huai Huang, Saratoga, NY (US);

Christopher J. Penny, Saratoga Springs, NY (US);

Michael Rizzolo, Albany, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/522 (2006.01); H01L 23/532 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5226 (2013.01); H01L 21/7682 (2013.01); H01L 21/7684 (2013.01); H01L 21/76802 (2013.01); H01L 21/76819 (2013.01); H01L 21/76829 (2013.01); H01L 21/76834 (2013.01); H01L 21/76843 (2013.01); H01L 21/76877 (2013.01); H01L 23/5329 (2013.01); H01L 23/53219 (2013.01); H01L 23/53223 (2013.01); H01L 23/53233 (2013.01); H01L 23/53238 (2013.01); H01L 21/76825 (2013.01); H01L 21/76828 (2013.01); H01L 21/76832 (2013.01); H01L 21/76883 (2013.01); H01L 23/53252 (2013.01); H01L 2221/1047 (2013.01);
Abstract

A method of forming a semiconductor device includes forming a porous dielectric layer including a recessed portion, forming a conductive layer in the recessed portion of the porous dielectric layer, and forming a conformal cap layer on the porous dielectric layer and on the conductive layer in the recessed portion, an upper surface of the porous dielectric layer being exposed through a gap in the conformal cap layer.


Find Patent Forward Citations

Loading…