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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10365639 B1

PDFFull Text
Date of Patent:
Jul. 30, 2019

Filed:

Aug. 26, 2016

Feature selection and automated process window monitoring through outlier detection

Applicant:

Kla-tencor Corporation, Milpitas, CA (US);

Inventors:

Shabnam Ghadar, Sunnyvale, CA (US);

Sina Jahanbin, San Jose, CA (US);

Himanshu Vajaria, San Jose, CA (US);

Bradley Ries, San Jose, CA (US);

Assignee:

KLA-Tencor Corporation, Milpitas, CA (US);

Attorney:

Hodgson Russ LLP

Primary Examiner:

Moazzam Hossain

Int. Cl.
CPC ...
G05B 19/408 (2006.01); G06N 5/02 (2006.01); G05B 19/418 (2006.01); H01L 21/66 (2006.01); G06N 20/00 (2019.01);
U.S. Cl.
CPC ...
G05B 19/41875 (2013.01); G06N 20/00 (2019.01); H01L 22/12 (2013.01); H01L 22/20 (2013.01); G05B 2219/37224 (2013.01); Y02P 90/22 (2015.11);
Abstract

Feature extraction and classification is used for process window monitoring. A classifier, based on combinations of metrics of masked die images and including a set of significant combinations of one or more segment masks, metrics, and wafer images, is capable of detecting a process non-compliance. A process status can be determined using a classifier based on calculated metrics. The classifier may learn from nominal data.

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Ghadar, Shabnam. (2019). Feature selection and automated process window monitoring through outlier detection (U.S. Patent No. 10365639). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10365639

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