The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2019
Filed:
Dec. 28, 2017
Applicant:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Inventors:
Yasushi Fujii, Kawasaki, JP;
Kunihiro Noda, Kawasaki, JP;
Hiroki Chisaka, Kawasaki, JP;
Kazuya Someya, Kawasaki, JP;
Koichi Misumi, Kawasaki, JP;
Dai Shiota, Kawasaki, JP;
Assignee:
TOKYO OHKA KOGYO CO., LTD., Kawasaki-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08G 77/62 (2006.01); C09D 183/16 (2006.01); H01L 21/02 (2006.01); C08L 83/16 (2006.01);
U.S. Cl.
CPC ...
C09D 183/16 (2013.01); H01L 21/02222 (2013.01); H01L 21/02282 (2013.01); H01L 21/02318 (2013.01); H01L 21/02326 (2013.01); H01L 21/02337 (2013.01); C08G 77/62 (2013.01); C08L 83/16 (2013.01);
Abstract
A composition capable of stably providing a high-quality siliceous film even under relatively low-temperature heating conditions, and a method of using the composition for forming a siliceous film. The composition includes a polysilazane and an imidazole group-containing compound represented by Formula (B).