The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2019

Filed:

Mar. 14, 2014
Applicant:

Fujimi Incorporated, Kiyosu-shi, Aichi, JP;

Inventors:

Kohsuke Tsuchiya, Kiyosu, JP;

Hisanori Tansho, Kiyosu, JP;

Taiki Ichitsubo, Kiyosu, JP;

Assignee:

FUJIMI INCORPORATED, Kiyosu-Shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09G 1/02 (2006.01); C09G 1/16 (2006.01); C09K 13/00 (2006.01); H01L 21/02 (2006.01); C09K 3/14 (2006.01); C08F 216/06 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); C08F 216/06 (2013.01); C09G 1/16 (2013.01); C09K 3/1436 (2013.01); C09K 3/1454 (2013.01); H01L 21/02024 (2013.01);
Abstract

Provided are a polishing composition comprising a water-soluble polymer that has a molecular structure comprising a plurality of repeat unit species having different SP values and a polishing composition exhibiting an etching rate and an abrasive adsorption in prescribed ranges when determined by prescribed methods. Also provided is a method for producing a polishing composition, using an abrasive, a basic compound, a water-soluble polymer having an alkaline-hydrolytic functional group, and water. The method comprises a step of obtaining an agent A comprising at least the basic compound and a step of obtaining an agent B comprising at least the water-soluble polymer H.


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