The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2019
Filed:
Sep. 13, 2013
Cypress Semiconductor Corporation, San Jose, CA (US);
Cypress Semiconductor Corporation, San Jose, CA (US);
Abstract
A method for fabricating a non-volatile, ferroelectric random access memory (F-RAM) device with a reduced number of masking and etching steps is described. In one embodiment, the method includes forming an opening in an insulating layer over a surface of a substrate to expose a portion of the surface, and forming first spacers on sidewalls of the opening. A conductive layer is formed on the portion of the surface exposed in the opening and separated from the first spacers on the sidewalls of the opening by a gap therebetween. A bottom electrode of a ferroelectric capacitor is formed over the conductive layer and in the gap laterally of the conductive layer, a ferroelectric dielectric formed on the bottom electrode between the first spacers, and a top electrode formed on the ferroelectric dielectric.