The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2019
Filed:
May. 16, 2017
Nuflare Technology, Inc., Yokohama-shi, JP;
Kazuhiro Nakashima, Kawasaki, JP;
NuFlare Technology, Inc., Yokohama-shi, JP;
Abstract
An inspection method according to one aspect of the present disclosure, includes: acquiring a plurality of first acquisition images of a first die having a predetermined pattern; acquiring a plurality of second acquisition images of a second die having the predetermined pattern; acquiring a plurality of third acquisition images of a third die having the predetermined pattern; producing a first average image with the first acquisition images; producing a second average image with the second acquisition images: producing a third average image with the third acquisition images; producing a first comparative image with the first average image and the second average image; producing a second comparative image with the second average image and the third average image; producing a third comparative image with the first average image and the third average image; producing a reference image with the first acquisition images, the second acquisition images, and the third acquisition images; performing first comparison between the first comparative image and the reference image; performing second comparison between the second comparative image and the reference image; performing third comparison between the third comparative image and the reference image; determining, when a first defect is detected in the first comparison and the third comparison, that the first die has the first defect; determining, when a second defect is detected in the first comparison and the second comparison, that the second die has the second defect; and determining, when a third defect is detected in the second comparison and the third comparison, that the third die has the third defect.