The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2019
Filed:
Oct. 14, 2016
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Yasushi Fujii, Yamanashi, JP;
Takayuki Toshima, Hillsboro, OR (US);
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 43/12 (2006.01); H01L 21/304 (2006.01); H01L 43/08 (2006.01); H01L 27/22 (2006.01);
U.S. Cl.
CPC ...
H01L 43/12 (2013.01); H01L 21/304 (2013.01); H01L 27/222 (2013.01); H01L 43/08 (2013.01);
Abstract
Provided is a substrate including a first magnetic layer, a second magnetic layer, and a tunnel insulating layer formed of magnesium oxide and disposed between the first magnetic layer and the second magnetic layer. A cleaning liquid is supplied to the substrate to clean the substrate and then, a rinsing liquid is supplied to the substrate to rinse the cleaning liquid. The concentration of moisture contained in the cleaning liquid and the rinse liquid is than 3 wt % or less.