The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2019
Filed:
Jan. 18, 2018
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Gregory A. Schwind, Portland, OR (US);
Aurelien Philippe Jean Maclou Botman, Portland, OR (US);
Sean Kellogg, Portland, OR (US);
Leon van Kouwen, Rotterdam, NL;
Luigi Mele, Eindhoven, NL;
Assignee:
FEI COMPANY, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 27/20 (2006.01); H01J 37/08 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 27/20 (2013.01); H01J 27/205 (2013.01); H01J 37/08 (2013.01); H01J 37/26 (2013.01); H01J 2237/006 (2013.01); H01J 2237/061 (2013.01); H01J 2237/082 (2013.01);
Abstract
A collision ionization source is disclosed herein. An example source includes an ionization region arranged to receive a gas and a charged particle beam, the charged particle beam to ionize at least some of the gas, and a supply duct arranged to provide the gas to the ionization region, the supply duct having a non-uniform height decreasing from an input orifice to an output orifice, the output orifice arranged adjacent to the ionization region.