The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 11, 2019

Filed:

Jul. 12, 2017
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Elliot John Smith, Dresden, DE;

Nigel Chan, Dresden, DE;

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/51 (2006.01); H01L 29/165 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/517 (2013.01); H01L 29/165 (2013.01); H01L 29/665 (2013.01); H01L 29/6653 (2013.01); H01L 29/66628 (2013.01); H01L 29/66772 (2013.01);
Abstract

A high voltage transistor may be formed on the basis of well-established CMOS techniques by using a buried insulating material of an SOI architecture as gate dielectric material, while the gate electrode material may be provided in the form of a doped semiconductor region positioned below the buried insulating layer. The high voltage transistor may be formed with high process compatibility on the basis of a process flow for forming sophisticated fully depleted SOI transistors, wherein, in some illustrative embodiments, the high voltage transistor may also be provided as a fully depleted transistor configuration.


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