The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 04, 2019

Filed:

Jul. 27, 2016
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Bruce B. Doris, Slingerlands, NY (US);

Lisa F. Edge, Watervliet, NY (US);

Pouya Hashemi, White Plains, NY (US);

Alexander Reznicek, Troy, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/12 (2006.01); H01L 21/762 (2006.01); H01L 27/088 (2006.01); H01L 21/8234 (2006.01); H01L 21/02 (2006.01); H01L 21/84 (2006.01); H01L 29/04 (2006.01); H01L 29/06 (2006.01); H01L 29/10 (2006.01); H01L 29/161 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1203 (2013.01); H01L 21/02532 (2013.01); H01L 21/02609 (2013.01); H01L 21/7624 (2013.01); H01L 21/823412 (2013.01); H01L 21/823481 (2013.01); H01L 21/84 (2013.01); H01L 27/088 (2013.01); H01L 29/045 (2013.01); H01L 29/0649 (2013.01); H01L 29/1033 (2013.01); H01L 29/161 (2013.01); H01L 29/7838 (2013.01);
Abstract

Multiple threshold voltage devices on hybrid oriented substrates, and methods of manufacturing same are disclosed. A method for manufacturing a semiconductor device comprises performing a single epitaxy step on a hybrid orientation substrate including a first region having a first crystallographic orientation and a second region having a second crystallographic orientation different from the first crystallographic orientation, wherein the single epitaxy step forms a first layer disposed on the first region and a second layer disposed on the second region, the first layer has the first crystallographic orientation and a first composition, and the second layer has the second crystal orientation and a second composition different from the first composition.


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