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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10308752 B1

PDFFull Text
Date of Patent:
Jun. 04, 2019

Filed:

Apr. 05, 2017

Block copolymer

Applicant:

Jsr Corporation, Tokyo, JP;

Inventors:

Yuji Namie, Tokyo, JP;

Shinya Minegishi, Tokyo, JP;

Tomoki Nagai, Tokyo, JP;

Takuo Sone, Tokyo, JP;

Assignee:

JSR CORPORATION, Tokyo, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Jeffrey C Mullis

Int. Cl.
CPC ...
C08F 297/02 (2006.01); H01L 21/033 (2006.01); G03F 7/00 (2006.01); H01L 21/308 (2006.01); H01L 21/3213 (2006.01); B81C 1/00 (2006.01); C08L 53/00 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
C08F 297/026 (2013.01); B81C 1/00031 (2013.01); C08L 53/005 (2013.01); G03F 7/0002 (2013.01); G03F 7/0035 (2013.01); G03F 7/70 (2013.01); H01L 21/0273 (2013.01); H01L 21/0337 (2013.01); H01L 21/3086 (2013.01); H01L 21/32139 (2013.01); B81C 2201/0149 (2013.01);
Abstract

A block copolymer includes a polystyrene block including a styrene unit, and a polyalkyl (meth)acrylate block including an alkyl (meth)acrylate unit. The block copolymer includes an organic group that is bound to at least one end of a main chain of the block copolymer and that comprises a hetero atom. A polymerization initiation end of the block copolymer includes a structure derived from an alkyl lithium. The organic group included in the block copolymer includes a nitrogen atom, a sulfur atom, a phosphorus atom, a tin atom, or a combination thereof, or is represented by formula (1). Rrepresents a single bond or a divalent organic group having 1 to 30 carbon atoms; and Rrepresents a hydrogen atom, an aliphatic linear hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 30 carbon atoms, or the like.

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