The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2019
Filed:
Dec. 14, 2015
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Carl Zeiss Microscopy Gmbh, Jena, DE;
Gennady Fedosenko, Aalen, DE;
Michel Aliman, Oberkochen, DE;
Hin Yiu Anthony Chung, Ulm, DE;
Albrecht Ranck, Aalen, DE;
Leonid Gorkhover, Ulm, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Carl Zeiss Microscopy GmbH, Jena, DE;
Abstract
The disclosure relates to a mass spectrometer for mass spectrometric examination of gas mixtures, including: an ionization device and an ion trap for storage and mass spectrometric examination of the gas mixture. In one aspect of the disclosure, the ionization device is embodied for supplying ions and/or metastable particles of an ionization gas and/or for supplying electrons to the ion trap for ionizing the gas mixture to be examined and the mass spectrometer is embodied to determine the number of ions and/or metastable particles of the ionization gas present in the ion trap and/or the number of ions of a residual gas present in the ion trap prior to examining the gas mixture. The disclosure also relates to the use of such a mass spectrometer and a method for mass spectrometric examination of a gas mixture.