The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2019
Filed:
Jun. 10, 2016
Applicant:
Ebara Corporation, Tokyo, JP;
Inventor:
Tomonori Hirao, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C25D 5/48 (2006.01); C23C 18/16 (2006.01); C25D 17/00 (2006.01); C25D 17/06 (2006.01); B65G 45/10 (2006.01); B65G 45/22 (2006.01); B65G 45/24 (2006.01); B65G 45/26 (2006.01); C25D 21/02 (2006.01); C25D 21/04 (2006.01); C25D 21/06 (2006.01);
U.S. Cl.
CPC ...
C25D 5/48 (2013.01); B65G 45/10 (2013.01); B65G 45/22 (2013.01); B65G 45/24 (2013.01); B65G 45/26 (2013.01); C23C 18/163 (2013.01); C23C 18/1628 (2013.01); C23C 18/1632 (2013.01); C23C 18/1675 (2013.01); C23C 18/1689 (2013.01); C25D 17/001 (2013.01); C25D 17/06 (2013.01); C25D 21/02 (2013.01); C25D 21/04 (2013.01); C25D 21/06 (2013.01);
Abstract
A plating apparatus includes a processing bath configured to store a processing liquid therein, a transporter configured to immerse a substrate holder, holding a substrate, in the processing liquid, raise the substrate holder out of the processing bath, and transport the substrate holder in a horizontal direction, and a gas flow generator configured to generate a clean gas flow forward of the substrate with respect to a direction in which the substrate holder is transported. The transporter moves the gas flow generator together with the substrate holder in the horizontal direction while transporting the substrate holder in the horizontal direction.