The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2019
Filed:
Apr. 05, 2016
Applicant:
Aixtron SE, Herzogenrath, DE;
Inventors:
Carl Galewski, Santa Cruz, CA (US);
Stephen Edward Savas, Fremont, CA (US);
Merim Mukinovic, Würselen, DE;
Assignee:
AIXTRON SE, Herzogenrath, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/50 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4412 (2013.01); C23C 16/455 (2013.01); C23C 16/45563 (2013.01); C23C 16/50 (2013.01); H01J 37/32834 (2013.01);
Abstract
Described herein is an exhaust manifold () comprising suction opening (), a gas extraction chamber (), an intermediate space (), a gas collection chamber () and a suction line (). A flow-impeding structure may be present within the intermediate space (). The flow impeding structure may exert a flow resistance on the gas flow which is greater in a central zone (Z) than in edge zones (R) of the intermediate space (), causing gas to flow into the suction opening () at a substantially uniform gas flow speed across the cross section of the suction opening ().