The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2019
Filed:
Mar. 19, 2014
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Masashi Fujita, Tokyo, JP;
Masahiro Tsunoda, Tokyo, JP;
Katsunori Onuki, Tokyo, JP;
Katsuya Aibara, Tokyo, JP;
Seiichi Shindo, Kanagawa, JP;
Takaaki Nishimori, Kanagawa, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An object of the present invention is to provide a charged particle beam device that suppresses the influence of an external electromagnetic wave, even when a shielding member, such as a vacuum valve, is in the open state. To achieve the above object, a charged particle beam device including a vacuum chamber () having an opening () that surrounds a sample delivery path is proposed. The charged particle beam device includes a conductive material () surrounding the opening () for conduction between the vacuum chamber () and a conductive member () disposed on the atmosphere side. According to an embodiment of the present invention, it is possible to restrict an electromagnetic wave () from reaching the sample chamber via the delivery path.