The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2019
Filed:
May. 15, 2017
Fei Company, Hillsboro, OR (US);
Paul Keady, Portland, OR (US);
Brennan Peterson, Portland, OR (US);
Guus Das, Valkenswaard, NL;
Craig Matthew Henry, Hillsboro, OR (US);
Larry Dworkin, Portland, OR (US);
Jeff Blackwood, Portland, OR (US);
Stacey Stone, Beaverton, OR (US);
Michael Schmidt, Gresham, OR (US);
FEI Company, Hillsboro, OR (US);
Abstract
A method for TEM sample preparation and analysis that can be used in a FIB-SEM system without re-welds, unloads, user handling of the lamella, or a motorized flip stage. The method allows a dual beam FIB-SEM system with a typical tilt stage to be used to extract a sample to from a substrate, mount the sample onto a TEM sample holder capable of tilting, thin the sample using FIB milling, and rotate the sample so that the sample face is perpendicular to an electron column for STEM imaging.