The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 07, 2019

Filed:

Dec. 19, 2016
Applicant:

Nippon Steel & Sumitomo Metal Corporation, Tokyo, JP;

Inventors:

Yusuke Konno, Tokyo, JP;

Takamichi Kobayashi, Tokyo, JP;

Toshio Akagi, Tokyo, JP;

Atsuhiro Hibi, Tokyo, JP;

Nobuhiro Furuya, Tokyo, JP;

Akihito Nakazaki, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); G01N 21/892 (2006.01); G01N 21/94 (2006.01); G01N 21/952 (2006.01); G01N 21/359 (2014.01); G01N 21/00 (2006.01); G01N 15/06 (2006.01);
U.S. Cl.
CPC ...
G01N 21/8806 (2013.01); G01N 21/8851 (2013.01); G01N 21/892 (2013.01); G01N 15/06 (2013.01); G01N 21/00 (2013.01); G01N 21/359 (2013.01); G01N 21/88 (2013.01); G01N 21/94 (2013.01); G01N 21/952 (2013.01); G01N 2201/0697 (2013.01);
Abstract

An inspection object imaging apparatus includes: a light source configured to produce a light beam belonging to an infrared wavelength band and having a predetermined spread half-angle on a surface of an inspection object; a projection optical system to project the light beam on the surface of the inspection object at a predetermined projection angle; and an imaging unit. The imaging unit includes an imaging optical system configured to condense reflected light and branch the reflected light to two different directions, and a first image sensor and a second image sensor, the first image sensor positioned on the inspection object side with respect to a position of the imaging optical system that is conjugate with the surface of the inspection object, along an optical axis of the reflected light, and the second image sensor positioned on the reflected-light travel direction side with respect to the conjugate position.


Find Patent Forward Citations

Loading…