The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2019
Filed:
Dec. 21, 2015
Applicant:
Beneq Oy, Espoo, FI;
Inventors:
Pekka Soininen, Espoo, FI;
Olli Pekonen, Espoo, FI;
Assignee:
BENEQ OY, Espoo, FI;
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/54 (2006.01); C30B 25/14 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45529 (2013.01); C23C 16/45551 (2013.01); C23C 16/45563 (2013.01); C23C 16/54 (2013.01); C23C 16/545 (2013.01); C30B 25/14 (2013.01); H01L 21/6719 (2013.01); H01L 21/67173 (2013.01); H01L 21/681 (2013.01);
Abstract
A nozzle head, apparatus and method for providing a coating on a surface of a substrate by subjecting the surface of the substrate to successive surface reactions of at least two precursors according to principles of atomic layer deposition. The nozzle head comprises an output face provided with at least two different precursor zones, the at least two different precursor zones being arranged to provide different coating layers on the surface of the substrate.