The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 30, 2019

Filed:

May. 01, 2017
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Harry-Hak-Lay Chuang, Zhubei, TW;

Wei Cheng Wu, Zhubei, TW;

Ya-Chen Kao, Fuxing Township, TW;

Yi Hsien Lu, Yuanchang Township, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01); H01L 27/11573 (2017.01); H01L 29/66 (2006.01); H01L 29/423 (2006.01); H01L 29/51 (2006.01); H01L 21/8234 (2006.01); H01L 27/092 (2006.01); H01L 27/088 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11573 (2013.01); H01L 21/823462 (2013.01); H01L 27/092 (2013.01); H01L 29/42344 (2013.01); H01L 29/513 (2013.01); H01L 29/517 (2013.01); H01L 29/665 (2013.01); H01L 29/6656 (2013.01); H01L 29/66545 (2013.01); H01L 27/088 (2013.01);
Abstract

The present disclosure relates to a structure and method for embedding a non-volatile memory (NVM) in a HKMG (high-κ metal gate) integrated circuit which includes a high-voltage (HV) HKMG transistor. NVM devices (e.g., flash memory) are operated at high voltages for its read and write operations and hence a HV device is necessary for integrated circuits involving non-volatile embedded memory and HKMG logic circuits. Forming a HV HKMG circuit along with the HKMG periphery circuit reduces the need for additional boundaries between the HV transistor and rest of the periphery circuit. This method further helps reduce divot issue and reduce cell size.


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