The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2019
Filed:
Sep. 14, 2017
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Ken-Hsien Hsieh, Taipei, TW;
Wen-Li Cheng, Taipei, TW;
Dong-Yo Jheng, Hsinchu, TW;
Chih-Ming Lai, Hsinchu, TW;
Ru-Gun Liu, Hsinchu County, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Abstract
A method of fabricating an integrated circuit (IC) with first and second different lithography techniques includes providing a layout of the IC having IC patterns; and deriving a graph from the layout. The graph has vertices and edges connecting some of the vertices. The vertices represent the IC patterns. The edges are classified into at least two types, a first type connecting two vertices that are to be patterned separately with the first and second lithography techniques, a second type connecting two vertices that are to be patterned in a same process using the first lithography technique or to be patterned separately with the first and second lithography techniques. The method further includes decomposing the vertices into first and second subsets, wherein the IC patterns corresponding to the first and second subsets are to be patterned on a wafer using the first and second lithography techniques respectively.