The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 30, 2019

Filed:

May. 22, 2017
Applicant:

Carl Zeiss Microscopy Gmbh, Jena, DE;

Inventors:

Christian Hendrich, Westhausen, DE;

Bernd Schindler, Aalen, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/2251 (2018.01); H01J 37/22 (2006.01); H01J 37/28 (2006.01); H01J 37/26 (2006.01); G01N 23/04 (2018.01);
U.S. Cl.
CPC ...
G01N 23/2251 (2013.01); H01J 37/222 (2013.01); H01J 37/263 (2013.01); H01J 37/265 (2013.01); H01J 37/28 (2013.01); G01N 23/04 (2013.01); H01J 2237/2813 (2013.01);
Abstract

Generating an image of an object and/or a representation of data about the object uses a particle beam apparatus. The particle beam apparatus comprises at least one control unit for setting a guide unit by selecting a value of a control parameter of the control unit. A functional relationship is determined between a first control parameter value and a second control parameter value depending on the predeterminable range of a landing energy of the particles. A desired value of the landing energy is set. The value of the control parameter corresponding to the desired value of the landing energy is selected on the basis of the determined functional relationship and the guide unit is controlled using the value of the control parameter corresponding to the desired value of the landing energy.


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