The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2019
Filed:
Feb. 17, 2016
Toray Engineering Co., Ltd., Chuo-ku, Tokyo, JP;
Katsuichi Kitagawa, Moriyama, JP;
Masafumi Otsuki, Otsu, JP;
TORAY ENGINEERING CO., LTD., Tokyo, JP;
Abstract
A film thickness measurement device includes a light source, an imaging component, and a controller. The controller estimates unknown variables I(j), I(j), k(j), and t(i) based on the Formula (1), where i represents an observation point number of an interference image captured by the imaging component, j represents a number for a type of wavelength of monochromatic light, λ(j) represents wavelength of the monochromatic light, n represents a refractive index of a semi-transparent film, g(i,j) represents a brightness value observed at an observation point, I(j) represents an intensity of reflected light from a front face of the semi-transparent film, I(j) represents an intensity of reflected light from a rear face of the semi-transparent film when there is no absorption of light in the semi-transparent film, k(j) represents an absorption coefficient of the semi-transparent film, and t(i) represents a film thickness of the semi-transparent film.