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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10269560 B1

PDFFull Text
Date of Patent:
Apr. 23, 2019

Filed:

Jun. 15, 2016

Atomic layer deposition method for manufacturing semiconductor structure

Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

Yun-Tzu Chiu, Hsinchu, TW;

Hsueh-Hui Kuo, Changhua County, TW;

Lin-Jung Wu, Miaoli County, TW;

Chih-Tsung Lee, Hsinchu, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu, TW;

Attorneys:

WPAT, P.C., Intellectual Property Attorneys

Anthony King

Primary Examiner:

Selim U Ahmed

Int. Cl.
CPC ...
H01L 21/30 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0217 (2013.01); H01L 21/0228 (2013.01); H01L 21/0231 (2013.01); H01L 21/02211 (2013.01); H01L 21/02274 (2013.01); H01L 21/02315 (2013.01);
Abstract

A method for manufacturing semiconductor structure is disclosed. The method includes: providing a semiconductor substrate; hydrogenizing a surface of the semiconductor substrate; supplying a precursor to the surface of the semiconductor substrate; and supplying a reactant to the surface of the semiconductor substrate. An associated method for performing an atomic layer deposition (ALD) upon a semiconductor substrate and an associated atomic layer deposition (ALD) method are also disclosed.

Find Patent Forward Citations

Chiu, Yun-Tzu. (2019). Atomic layer deposition method for manufacturing semiconductor structure (U.S. Patent No. 10269560). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10269560

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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