The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2019
Filed:
Mar. 20, 2018
Applicant:
Nuflare Technology, Inc., Yokohama-shi, JP;
Inventor:
Kazuhiro Nakashima, Kawasaki, JP;
Assignee:
NuFlare Technology, Inc., Yokohama-shi, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G01N 21/956 (2006.01); G01N 21/88 (2006.01);
U.S. Cl.
CPC ...
G01N 21/95607 (2013.01); G01N 21/8806 (2013.01); G01N 2021/95676 (2013.01);
Abstract
Provided is an inspection method including: irradiating a sample to be inspected with illuminating light; acquiring a first image of the sample to be inspected, with an auto focuser using the illuminating light reflected from the sample to be inspected; storing autofocus function coordinates acquired with the auto focuser in the acquiring the first image; calculating a two-dimensional polynomial approximation of the autofocus function coordinates; and controlling focusing in acquiring a second image of the sample to be inspected, with the two-dimensional polynomial approximation.