Scanning electron microscope and electron trajectory adjustment method therefor

Abstract

To provide a scanning electron microscope having an electron spectroscopy system to attain high spatial resolution and a high secondary electron detection rate under the condition that energy of primary electrons is low, the scanning electron microscope includes: an objective lensprimary electron acceleration meansthat accelerates primary electronsprimary electron deceleration meansthat decelerates the primary electrons and irradiates them to a samplea secondary electron deflectorthat deflects secondary electronsfrom the sample to the outside of an optical axis of the primary electrons; a spectroscopethat disperses secondary electrons; and a controller that controls application voltage to the objective lens, the primary electron acceleration means and the primary electron deceleration means so as to converge the secondary electrons to an entrance of the spectroscope.