The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2019
Filed:
Mar. 02, 2011
Brian Brown, Palo Alto, CA (US);
Brian Burrows, San Jose, CA (US);
David Berkstressor, Los Gatos, CA (US);
Gang He, Cupertino, CA (US);
Thomas J Gmitter, Sunnyvale, CA (US);
Brian Brown, Palo Alto, CA (US);
Brian Burrows, San Jose, CA (US);
David Berkstressor, Los Gatos, CA (US);
Gang He, Cupertino, CA (US);
Thomas J Gmitter, Sunnyvale, CA (US);
ALTA DEVICES, INC., Sunnyvale, CA (US);
Abstract
Epitaxial lift off systems and methods are presented. In one embodiment a tape is disposed on the opposite side of the epitaxial material than the substrate is used to hold the epitaxial material during the etching and removal steps of the ELO process. In various embodiments, the apparatus for removing the ELO film from the substrates without damaging the ELO film may include an etchant reservoir, substrate handling and tape handling mechanisms, including mechanisms to manipulate (e.g., cause tension, peel, widen the etch gap, etc.) the lift off component during the lift off process.