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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10254660 B1

PDFFull Text
Date of Patent:
Apr. 09, 2019

Filed:

May. 31, 2018

Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder

Applicant:

Asml Netherlands B.v., Veldhoven, NL;

Inventors:

Raymond Wilhelmus Louis Lafarre, Helmond, NL;

Nicolaas Ten Kate, Almkerk, NL;

Nina Vladimirovna Dziomkina, Eindhoven, NL;

Yogesh Pramod Karade, Eindhoven, NL;

Assignee:

ASML Netherlands B.V., Veldhoven, NL;

Attorney:

Pillsbury Winthrop Shaw Pitman, LLP

Primary Examiner:

Mesfin T Asfaw

Int. Cl.
CPC ...
G03B 27/52 (2006.01); G03B 27/42 (2006.01); G03F 7/20 (2006.01); H01L 21/687 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70716 (2013.01); C23C 16/44 (2013.01); G03F 7/707 (2013.01); G03F 7/70341 (2013.01); G03F 7/70975 (2013.01); H01L 21/6875 (2013.01); Y10T 29/49 (2015.01);
Abstract

A substrate holder for a lithographic apparatus has a planarization layer provided on a surface thereof. The planarization layer provides a smooth surface for the formation of an electronic component such as a thin film electronic component. The planarization layer may be provided in multiple sub layers. The planarization layer may smooth over roughness caused by removal of material from a blank to form burls on the substrate holder.

Find Patent Forward Citations

Lafarre, Raymond Wilhelmus Louis. (2019). Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder (U.S. Patent No. 10254660). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10254660

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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