The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2019
Filed:
Mar. 07, 2017
Applied Materials, Inc., Santa Clara, CA (US);
Laksheswar Kalita, Mumbai, IN;
Prerna S. Goradia, Mumbai, IN;
Geetika Bajaj, New Delhi, IN;
Yogita Pareek, San Jose, CA (US);
Yixing Lin, Saratoga, CA (US);
Dmitry Lubomirsky, Cupertino, CA (US);
Ankur Kadam, Mumbai, IN;
Bipin Thakur, Mumbai, IN;
Kevin A. Papke, Portland, OR (US);
Kaushik Vaidya, Bangalore, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The present disclosure generally relates to methods of electro-chemically forming yttria or yttrium oxide. The methods may include the optional preparation of a an electrochemical bath, the electrodepositon of yttria or yttrium oxide onto a substrate, removal of solvent form the surface of the substrate, and post treatment of the substrate having the electrodeposited yttria or yttrium oxide thereon.