The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 02, 2019

Filed:

Mar. 06, 2018
Applicant:

Toshiba Memory Corporation, Minato-ku, JP;

Inventors:

Marina Yamaguchi, Yokkaichi, JP;

Shosuke Fujii, Kobe, JP;

Riichiro Takaishi, Kawasaki, JP;

Yuuichi Kamimuta, Yokkaichi, JP;

Shoichi Kabuyanagi, Yokkaichi, JP;

Masumi Saitoh, Yokkaichi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 45/00 (2006.01); H01L 27/24 (2006.01); G11C 11/22 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 45/10 (2013.01); H01L 27/2481 (2013.01); H01L 45/1233 (2013.01); H01L 45/146 (2013.01); G11C 11/221 (2013.01); H01L 28/56 (2013.01); H01L 28/75 (2013.01);
Abstract

According to one embodiment, a memory element includes a first layer, a second layer, and a third layer. The first layer is conductive. The second layer is conductive. The third layer includes hafnium oxide and is provided between the first layer and the second layer. The first layer includes a first region, a second region, and a third region. The first region includes a first element and a first metallic element. The first element is selected from a group consisting of carbon and nitrogen. The second region includes a second metallic element and is provided between the first region and the third layer. The third region includes titanium oxide and is provided between the second region and the third layer.


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