The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2019
Filed:
Jul. 24, 2015
Applicant:
Kobus, Montboonot-Saint-Martin, FR;
Inventors:
Julien Vitiello, Grenoble, FR;
Jean-Luc Delcarri, Saint Ismier, FR;
Fabien Piallat, Montbonnot-Saint-Martin, FR;
Assignee:
Other;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23F 1/00 (2006.01); C07C 49/167 (2006.01); C07C 45/00 (2006.01); C23C 14/56 (2006.01); C23C 16/44 (2006.01); C23G 5/00 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23F 1/00 (2013.01); C07C 45/00 (2013.01); C07C 49/167 (2013.01); C23C 14/564 (2013.01); C23C 16/4405 (2013.01); C23G 5/00 (2013.01); H01J 37/32862 (2013.01);
Abstract
A method for removing a metallic deposit disposed on a surface in a chamber, including the following steps: