The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2019
Filed:
Sep. 29, 2016
Kla-tencor Corporation, Milpitas, CA (US);
Anant Chimmalgi, San Jose, CA (US);
Rudolf Brunner, Mountain View, CA (US);
Anatoly Shchemelinin, Bozeman, MT (US);
Ilya Bezel, Mountain View, CA (US);
Erik Kim, Sunnyvale, CA (US);
Rajeev Patil, Fremont, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
An illumination source for igniting and sustaining a plasma in a plasma lamp of a laser-sustained plasma (LSP) broadband source includes one or more ignition lasers configured to ignite the plasma within a gas contained within the plasma lamp. The illumination sources also include one or more sustaining lasers configured to sustain the plasma. The illumination sources include a delivery optical fiber, one or more optical elements configured to selectively optically couple an output of the one or more ignition lasers, and an output of the one or more sustaining lasers to the delivery optical fiber.