The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2019
Filed:
Mar. 10, 2016
Shin-etsu Handotai Co., Ltd., Tokyo, JP;
Hisayuki Saito, Shirakawa, JP;
SHIN-ETSU HANDOTAI CO., LTD., Tokyo, JP;
Abstract
A method for evaluating a haze of a substrate surface by a particle counter apparatus using scattering light, the method including calibrating a haze value with the use of a standard sample at the time of obtaining the haze value of the substrate surface from scattering light intensity of light which is entered on the substrate surface, and by using a sample having standard particles applied thereto as the standard sample. Consequently, the method for evaluating a haze by which a haze value of the particle counter apparatus can be calibrated with the use of the standard sample for a haze and a measurement accuracy of the haze can be improved.